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1

Experimental Study and Implementation of a Novel Digital Closed-Loop Control System for Coriolis Mass Flowmeter

Hu, Chun, Zheng, Dezhi, Fan, Shangchun

Journal:

IEEE Sensors Journal

Année:

2013

Langue:

english

Fichier:

PDF, 763 KB

english, 2013

2

Modeling of Coriolis mass flow meter of a general plane-shape pipe

Guirguis Samer, ShangChun Fan

Journal:

Flow Measurement and Instrumentation

Année:

2010

Langue:

english

Fichier:

PDF, 1.70 MB

english, 2010

3

Uncertainty analysis for design and optimization of a micro Coriolis mass flow sensor

Feng, Dan, Fan, Shangchun, Zheng, Dezhi, Shi, Huichao

Journal:

Microsystem Technologies

Année:

2017

Langue:

english

Fichier:

PDF, 905 KB

english, 2017

4

Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an E-type round diaphragm for measuring the concentrated force

Shangchun Fan, Guangyu Liu, Man Hyung Lee

Journal:

Sensors and Actuators A: Physical

Année:

1997

Langue:

english

Fichier:

PDF, 521 KB

english, 1997

5

Research development of measuring methods on the tribology characters for movable MEMS devices: a review

Zhanshe Guo, Zhou Feng, Shangchun Fan, Dezhi Zheng, Haihan Zhuang

Journal:

Microsystem Technologies

Année:

2009

Langue:

english

Fichier:

PDF, 644 KB

english, 2009

6

An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

Zhangyang Tang, Shangchun Fan, Weiwei Xing, Zhanshe Guo, Zhengyuan Zhang

Journal:

Microsystem Technologies

Année:

2011

Langue:

english

Fichier:

PDF, 619 KB

english, 2011

7

A method to measure the micro-capacitance for MEMS comb actuators

Guo Zhanshe, Cao Le, Wang Jinliang, Fan Shangchun

Journal:

Microsystem Technologies

Année:

2011

Langue:

english

Fichier:

PDF, 741 KB

english, 2011

8

Frequency measurement study of resonant vibratory gyroscopes

Yan Li, Shangchun Fan, Zhanshe Guo, Jing Li, Le Cao

Journal:

Journal of Sound and Vibration

Année:

2012

Langue:

english

Fichier:

PDF, 661 KB

english, 2012

9

Theory and FEM simulation study of the double-clamped resonant beam with slit-structure

Shi, Huichao, Fan, Shangchun, Xing, Weiwei, Li, Cheng, Sun, Jinhao

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 702 KB

english, 2014

10

Graphene diaphragm analysis for pressure or acoustic sensor applications

Wang, Dongxue, Fan, Shangchun, Jin, Wei

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 471 KB

english, 2015

11

Interference characteristics in a Fabry–Perot cavity with graphene membrane for optical fiber pressure sensors

Li, Cheng, Xiao, Jun, Guo, Tingting, Fan, Shangchun, Jin, Wei

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 734 KB

english, 2015

12

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

Hu, Chun, Zheng, Dezhi, Fan, Shangchun, Wiegerink, Remco John, Zhanshe, Guo

Journal:

Microsystem Technologies

Année:

2016

Langue:

english

Fichier:

PDF, 915 KB

english, 2016

13

A method to simulate the vibrating characters of the resonator for resonant MEMS gyroscope

Cao, Le, Fan, Shangchun, Guo, Zhanshe, Xu, Long

Journal:

Microsystem Technologies

Année:

2016

Langue:

english

Fichier:

PDF, 2.16 MB

english, 2016

14

Study on solving method for output signal of frequency resonant gyroscope

Cao, Le, Fan, Shangchun, Guo, Zhanshe, Li, Cheng

Journal:

Microsystem Technologies

Année:

2017

Langue:

english

Fichier:

PDF, 1.84 MB

english, 2017

15

Measurement of thermal expansion coefficient of graphene diaphragm using optical fiber Fabry–Perot interference

Li, Cheng, Liu, Qianwen, Peng, Xiaobin, Fan, Shangchun

Journal:

Measurement Science and Technology

Année:

2016

Langue:

english

Fichier:

PDF, 874 KB

english, 2016

16

Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

Shi, Huichao, Fan, Shangchun, Li, Wenlong

Journal:

Microsystem Technologies

Année:

2018

Langue:

english

Fichier:

PDF, 728 KB

english, 2018

17

Nonlinear Vibration Characteristics of Coriolis Mass Flowmeter

Dezhi Zheng, Shuai Wang, Shangchun Fan

Journal:

Chinese Journal of Aeronautics

Année:

2009

Langue:

english

Fichier:

PDF, 320 KB

english, 2009

18

Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator

Guo Zhanshe, Feng Zhou, Cao Le, Fan Shangchun

Journal:

Microsystem Technologies

Année:

2011

Langue:

english

Fichier:

PDF, 587 KB

english, 2011

19

Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Li Yan, Fan Shangchun, Guo Zhanshe, Li Jing, Cao Le

Journal:

Microsystem Technologies

Année:

2012

Langue:

english

Fichier:

PDF, 843 KB

english, 2012

20

Non-linear dynamics of an electrothermally excited resonant pressure sensor

Qingfeng Li, Shangchun Fan, Zhangyang Tang, Weiwei Xing

Journal:

Sensors and Actuators A: Physical

Année:

2012

Langue:

english

Fichier:

PDF, 778 KB

english, 2012

21

Mathieu equation with application to analysis of dynamic characteristics of resonant inertial sensors

Yan Li, Shangchun Fan, Zhanshe Guo, Jing Li, Le Cao, Haihan Zhuang

Journal:

Communications in Nonlinear Science and Numerical Simulation

Année:

2013

Langue:

english

Fichier:

PDF, 749 KB

english, 2013

22

Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm

Ma, Jun, Xuan, Haifeng, Ho, Hoi Lut, Jin, Wei, Yang, Yuanhong, Fan, Shangchun

Journal:

IEEE Photonics Technology Letters

Année:

2013

Langue:

english

Fichier:

PDF, 924 KB

english, 2013

23

Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure

Huichao Shi, Shangchun Fan, Weiwei Xing, Cheng Li, Jinhao Sun…

Journal:

Microsystem Technologies

Année:

2013

Langue:

english

Fichier:

PDF, 553 KB

english, 2013

24

SPIE Proceedings [SPIE Seventh International Symposium on Instrumentation and Control Technology - Beijing, China (Friday 10 October 2008)] Seventh International Symposium on Instrumentation and Control Technology: Measurement Theory and Systems and Aeronautical Equipment - An analysis on the theory of pulse oximetry by Monte Carlo simulation

Fan, Shangchun, Cai, Rui, Xing, Weiwei, Liu, Changting, Chen, Guangfei, Wang, Junfeng, Fang, Jiancheng, Wang, Zhongyu

Année:

2008

Langue:

english

Fichier:

PDF, 220 KB

english, 2008

25

Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

Shi, Huichao, Fan, Shangchun, Zhang, Yuwen, Sun, Jinhao

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 1.08 MB

english, 2015

26

[IEEE 2010 IEEE Symposium on Industrial Electronics and Applications (ISIEA 2010) - Penang, Malaysia (2010.10.3-2010.10.5)] 2010 IEEE Symposium on Industrial Electronics and Applications (ISIEA) - A dynamic performance improvement method of Coriolis Mass Flowmeters

Dezhi, Zheng, Zongling, Wu, Shangchun, Fan, Dongshun, Ren, Ting, Liu

Année:

2010

Langue:

english

Fichier:

PDF, 834 KB

english, 2010

27

[IEEE 2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) - London, United Kingdom (2012.07.11-2012.07.13)] 2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings - The design and simulation study of the electrothermal excitation resonant beam based on slit-structure stress concentration effect

Shi, HuiChao, Fan, Shangchun, Xing, Weiwei, Sun, Jinhao

Année:

2012

Langue:

english

Fichier:

PDF, 315 KB

english, 2012

28

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Nonlinear vibration in resonant silicon bridge pressure sensor: Theory and experiment

Li, Qingfeng, Fan, Shangchun, Tang, Zhangyang, Xing, Weiwei

Année:

2011

Langue:

english

Fichier:

PDF, 609 KB

english, 2011

29

[IEEE 2011 International Conference on Measuring Technology and Mechatronics Automation (ICMTMA) - Shanghai, China (2011.01.6-2011.01.7)] 2011 Third International Conference on Measuring Technology and Mechatronics Automation - The Theoretical Model and Simulation of Resonant Sensors

Weiwei, Xing, Yan, Du, Shangchun, Fan

Année:

2011

Langue:

english

Fichier:

PDF, 181 KB

english, 2011

30

[IEEE Instruments (ICEMI) - Beijing, China (2009.08.16-2009.08.19)] 2009 9th International Conference on Electronic Measurement & Instruments - Analysis on vibration characteristics of coriolis mass flow sensor

Wang, Shuai, Zheng, Dezhi, Fan, Shangchun

Année:

2009

Langue:

english

Fichier:

PDF, 133 KB

english, 2009

31

[IEEE 2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) - London, United Kingdom (2012.07.11-2012.07.13)] 2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings - Non-destructive testing of solid wood plate using variable permittivity plate capacitor

Zhao, Zhiling, Fan, Shangchun, Zheng, Dezhi

Année:

2012

Langue:

english

Fichier:

PDF, 715 KB

english, 2012

32

Design and Theoretical Analysis of a Resonant Sensor for Liquid Density Measurement

Zheng, Dezhi, Shi, Jiying, Fan, Shangchun

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 621 KB

english, 2012

33

SPIE Proceedings [SPIE Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation - Beijing, China (Friday 13 October 2006)] Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation - A micromachined resonant accelerometer

Ren, Jie, Fan, Shangchun, Wang, Luda, Guo, Zhanshe, Fang, Jiancheng, Wang, Zhongyu

Année:

2006

Langue:

english

Fichier:

PDF, 263 KB

english, 2006

34

SPIE Proceedings [SPIE AeroSense '97 - Orlando, FL (Monday 21 April 1997)] Navigation and Control Technologies for Unmanned Systems II - Finite element modeling and simulation on a novel microstructure silicon accelerometer with direct frequency output

Fan, Shangchun, Liu, Guangyu, Lee, Man Hyung, Speigle, Scott A.

Année:

1997

Langue:

english

Fichier:

PDF, 606 KB

english, 1997

35

SPIE Proceedings [SPIE Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation - Beijing, China (Friday 13 October 2006)] Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation - Modeling and structure parameters design of the quartz fork resonant accelerometers

Fan, Shangchun, Zhuang, Haihan, Wang, Wei, Zhu, Hongsheng, Fang, Jiancheng, Wang, Zhongyu

Année:

2006

Langue:

english

Fichier:

PDF, 223 KB

english, 2006

36

SPIE Proceedings [SPIE Seventh International Symposium on Instrumentation and Control Technology - Beijing, China (Friday 10 October 2008)] Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence - Microstructure silicon force sensor and its simulation

Mohamed, Ali El Mahdi, Fan, Shangchun, Guo, Zhanshe, Fang, Jiancheng, Wang, Zhongyu

Année:

2008

Langue:

english

Fichier:

PDF, 248 KB

english, 2008

37

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Sun, Jinhao, Fan, Shangchun, Shi, Huichao, Xing, Weiwei, Zhao, Chen, Li, Cheng

Journal:

Microsystem Technologies

Année:

2016

Langue:

english

Fichier:

PDF, 1.87 MB

english, 2016

38

A silicon micromachined resonant pressure sensor

Tang, Zhangyang, Fan, Shangchun, Cai, Chenguang

Journal:

Journal of Physics Conference Series

Année:

2009

Langue:

english

Fichier:

PDF, 402 KB

english, 2009

39

Effects of graphene membrane parameters on diaphragm-type optical fibre pressure sensing characteristics

Li, Cheng, Xiao, Jun, Guo, Tingting, Fan, Shangchun, Jin, Wei

Journal:

Materials Research Innovations

Année:

2015

Langue:

english

Fichier:

PDF, 601 KB

english, 2015

40

Analyzing the temperature sensitivity of Fabry-Perot sensor using multilayer graphene diaphragm

Li, Cheng, Liu, Qianwen, Peng, Xiaobin, Fan, Shangchun

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 1.45 MB

english, 2015

41

Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

Shi, Huichao, Fan, Shangchun, Zhang, Yuwen

Journal:

Microsystem Technologies

Année:

2017

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2017

42

Theoretical analysis and experimental study of Coriolis mass flow sensor sensitivity

Zheng, Dezhi, Wang, Shuai, Liu, Bei, Fan, Shangchun

Journal:

Journal of Fluids and Structures

Année:

2016

Langue:

english

Fichier:

PDF, 1.32 MB

english, 2016

43

Design and optimization of slit-resonant beam in a MEMS pressure sensor based on uncertainty analysis

Shi, Huichao, Fan, Shangchun, Zhang, Yuwen

Journal:

Microsystem Technologies

Année:

2017

Langue:

english

Fichier:

PDF, 1.17 MB

english, 2017

44

Measuring Graphene Adhesion on Silicon Substrate by Single and Dual Nanoparticle-Loaded Blister

Gao, Xiangyang, Yu, Xiyu, Li, Buxuan, Fan, Shangchun, Li, Cheng

Journal:

Advanced Materials Interfaces

Année:

2017

Langue:

english

Fichier:

PDF, 2.13 MB

english, 2017

45

Theory and experiment research for ultra-low frequency maglev vibration sensor

Zheng, Dezhi, Liu, Yixuan, Guo, Zhanshe, Zhao, Xiaomeng, Fan, Shangchun

Journal:

Review of Scientific Instruments

Année:

2015

Langue:

english

Fichier:

PDF, 1.47 MB

english, 2015

46

A sensitivity-enhanced flexible acoustic sensor using side-polished fiber Bragg grating

Li, Cheng, Peng, Xiaobin, Zhang, Hui, Wang, Chao, Fan, Shangchun, Cao, Shaoqing

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 712 KB

english, 2018

47

Dynamic modeling of liquid impulse pressure generator for calibration of pressure sensors

Yang, Jun, Fan, Shangchun, Li, Bo, Huang, Riheng, Shi, Yusong, Shi, Bo

Journal:

Sensors and Actuators A: Physical

Année:

2018

Langue:

english

Fichier:

PDF, 4.75 MB

english, 2018

48

Ultrafast miniature fiber-tip Fabry–Perot humidity sensor with thin graphene oxide diaphragm

Li, Cheng, Yu, Xiyu, Zhou, Wei, Cui, Yubo, Liu, Jian, Fan, Shangchun

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 2.01 MB

english, 2018

49

Room-Temperature Pressure-Induced Optically-Actuated Fabry-Perot Nanomechanical Resonator with Multilayer Graphene Diaphragm in Air

Li, Cheng, Lan, Tian, Yu, Xiyu, Bo, Nan, Dong, Jingyu, Fan, Shangchun

Journal:

Année:

2017

Langue:

english

Fichier:

PDF, 6.55 MB

english, 2017

50

Design and Analysis of Silicon Resonant Accelerometer

Li, Jing, Fan, Shangchun, Guo, Zhanshe

Journal:

Research Journal of Applied Sciences, Engineering and Technology `

Année:

2013

Langue:

english

Fichier:

PDF, 206 KB

english, 2013